Open AccessМорфологические превращения в нанофазном смачивающем слое меди на кремнии, активированные воздействием зонда атомно-силового микроскопа
Author(s) -
Н.И. Плюснин,
А.М. Маслов
Publication year - 2018
Publication title -
pisʹma v žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-7471
pISSN - 0320-0116
DOI - 10.21883/pjtf.2018.05.45703.16950
Subject(s) - nanolithography , materials science , wetting , wetting layer , substrate (aquarium) , silicide , atomic force microscopy , nanotechnology , phase transition , layer (electronics) , silicon , crystallography , metallurgy , composite material , condensed matter physics , chemistry , fabrication , physics , medicine , oceanography , alternative medicine , pathology , geology
The phase transition of the nanophase Cu_2Si wetting layer on a Si(001) substrate to more stable Cu silicide has been selectively activated by atomic-force microscopy in air. The transition is accompanied by an increase in the lateral size and height of grains and a decrease in their density. The effect that has been identified can be used to form ordered nanoisland ensembles and in nanolithography.