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Особенности микроструктуры и свойств многоэлементных нитридных покрытий на основе TiZrNbAlYCr
Author(s) -
А.Д. Погребняк,
В.М. Береснев,
О.В. Бондар,
Я.О. Кравченко,
Б. Жоллыбеков,
А.И. Купчишин
Publication year - 2018
Publication title -
pisʹma v žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-7471
pISSN - 0320-0116
DOI - 10.21883/pjtf.2018.03.45575.16826
Subject(s) - crystallite , materials science , lattice constant , microstructure , phase (matter) , analytical chemistry (journal) , metallurgy , diffraction , chemistry , optics , physics , organic chemistry , chromatography
Multicomponent nanostructured coatings based on (TiZrNbAlYCr)N with a hardness as high as 47 GPa were obtained by cathodic arc deposition. The effect of partial nitrogen pressure P _N (with constant bias potential U _ b =–200 V applied to the substrate) on the phase-composition variation, the size of crystallites, and their relation to the microstructure and hardness was investigated. An increase in the nitrogen pressure resulted in the formation of two phases with characteristic BCC (the lattice period is 0.342 nm) and FCC lattices with averaged nanocrystallite sizes of 15 and 2 nm. At a high pressure of 0.5 Pa, crystallites in the FCC phase with a lattice period of 0.437 nm grew in size to ~7 nm. The hardness of deposited coatings with larger (3.5 nm) FCC-phase crystallites and smaller (7 nm) BCC-phase crystallites was enhanced considerably.

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