Open AccessОбобщенная нуль-эллипсометрия в схеме "поляризатор-образец-анализатор"
Author(s) -
Н.В. СопинскиЙ,
Г.П. Ольховик
Publication year - 2022
Publication title -
optika i spektroskopiâ
Language(s) - English
Resource type - Journals
eISSN - 2782-6694
pISSN - 0030-4034
DOI - 10.21883/os.2022.03.52166.2590-21
Subject(s) - polarizer , spectrum analyzer , azimuth , optics , anisotropy , sensitivity (control systems) , ellipsometry , sample (material) , light intensity , physics , birefringence , thin film , quantum mechanics , electronic engineering , thermodynamics , engineering
The null-method in generalized ellipsometry with the use of the compensator-free “polarizer ‒ sample ‒ analyzer” scheme is considered for the case of s- and p-polarized incident light on an anisotropic system. Analytical expressions are given that connect the measured angular value — the analyzer azimuth at the detected radiation intensity minimum — with the (2x2) anisotropic Jones matrix elements. To determine the optical and geometric parameters of the studied anisotropic systems, it is proposed to use this value’s dependence on the sample orientation (azimuth). The method sensitivity is estimated. It was found that it is comparable to the sensitivity of the “polarizer‒compensator‒sample‒analyzer” scheme. A comparative analysis of this method and the known photometric method of generalized ellipsometry in the “polarizer-sample-analyzer” scheme based on measuring the dependence of the reflected light intensity on the sample azimuth at the fixed polarizer and analyzer positions is carried out. It is estimated that, to obtain the same sensitivity of these two methods, the one arc minute error in the proposed method corresponds to the 0.05% relative error in determining the energy reflection coefficient in the photometric method.