Open AccessПараметрическая модель спектров оптических постоянных Hg-=SUB=-1-x-=/SUB=-Cd-=SUB=-x-=/SUB=-Te и определение состава соединения
Author(s) -
В. А. Швец,
D. V. Marin,
V. G. Remesnik,
И. А. Азаров,
М.В. Якушев,
С. В. Рыхлицкий
Publication year - 2020
Publication title -
žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-748X
pISSN - 0044-4642
DOI - 10.21883/os.2020.12.50315.349-20
Subject(s) - spectral line , in situ , epitaxy , range (aeronautics) , composition (language) , analytical chemistry (journal) , parametric statistics , parametric model , materials science , chemistry , computational physics , mineralogy , mathematics , physics , statistics , nanotechnology , linguistics , philosophy , organic chemistry , layer (electronics) , chromatography , astronomy , composite material
A parametric model describing the spectra of the optical constants Hg1-xCdxTe n( lam) and k(lam) for x values in the range from 0.2 to 0.4 is presented. The Model is based on empirical data measured in situ during epitaxial growth of the compound layers. Variants of using the obtained model for determining the composition of MCT in situ in real time are considered. A method for determining the composition based on spectral ellipsometric measurements is proposed, which provides an accuracy no worse than (del)x=±0.0035.