Open AccessДвухволновая лазерная стереолитография для создания ИК сенсоров для поверхностно-усиленной спектроскопии-=SUP=-*-=/SUP=-
Author(s) -
А.Г. Витухновский,
Р.Д. Звагельский,
Д.А. Колымагин,
А.В. Писаренко,
Д.А. Чубич
Publication year - 2019
Publication title -
žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-748X
pISSN - 0044-4642
DOI - 10.21883/os.2019.01.47055.271-18
Subject(s) - femtosecond , fabrication , materials science , stereolithography , laser , photopolymer , lithography , electron beam lithography , pentaerythritol , optics , optoelectronics , layer (electronics) , nanotechnology , resist , monomer , physics , medicine , alternative medicine , fire retardant , pathology , composite material , polymer
The results of applying two-photon femtosecond laser photopolymerization for fabrication of structures for sensitive IR sensors are reported. Two methods of sensor fabrication, a two-wave laser stereolithography and an electron-beam lithography, are compared. The possibility of applying the obtained structures for investigation of the effect of surface-enhanced IR absorption (SEIRA) with a STED-compatible oligomer pentaerythritol tetraacrylate (PETTA) as an analytical layer is demonstrated.