Open AccessМетоды исследования и управления микроплазменными процессами при синтезе покрытий
Author(s) -
А.И. Мамаев,
В.А. Мамаева,
Ю. Н. Беспалова
Publication year - 2022
Publication title -
žurnal tehničeskoj fiziki
Language(s) - Russian
Resource type - Journals
eISSN - 1726-748X
pISSN - 0044-4642
DOI - 10.21883/jtf.2022.09.52937.90-22
Subject(s) - microplasma , materials science , deposition (geology) , voltage , analytical chemistry (journal) , quenching (fluorescence) , transient voltage suppressor , current (fluid) , oxide , degradation (telecommunications) , transient (computer programming) , optoelectronics , electronic engineering , electrical engineering , chemistry , metallurgy , plasma , thermodynamics , environmental chemistry , computer science , physics , optics , engineering , biology , paleontology , quantum mechanics , fluorescence , sediment , operating system