Open AccessЛинзовый корректор волнового фронта для изучения плоских поверхностей
Author(s) -
М. Н. Торопов,
А.А. Ахсахалян,
И. В. Малышев,
М.С. Михайленко,
А. Е. Pestov,
N. N. Salashchenko,
А.К. Чернышов,
Н. И. Чхало
Publication year - 2021
Publication title -
žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-748X
pISSN - 0044-4642
DOI - 10.21883/jtf.2021.10.51374.108-21
Subject(s) - optics , wavefront , aperture (computer memory) , physics , interferometry , diffraction , beam (structure) , materials science , root mean square , laser beam quality , laser , laser beams , acoustics , quantum mechanics
The method of manufacturing and the results of studies of a lens corrector that converts a spherical diverging front into a plane one and is intended for studying flat surfaces as part of an interferometer with a diffraction comparison wave is described. A feature of the corrector is the use of an aspherical convex surface with a maximum deviation of ∼200 μm from the nearest sphere. The first experimental results are presented, indicating the prospects for using ion-beam processing to improve the quality of the wavefront. After the procedure of ion-beam processing, the aberrations over the entire aperture of the corrector decreased by more than 4 times and amounted to the parameter of the height difference PV = 207 nm (∼λ/3) and RMS = 19.2 nm (∼λ /33). On an area with a diameter of 80%, the aberrations fell to the nanometer level: PV = 65 nm (∼λ/10) and RMS = 8.3 nm (∼λ/76).