Open AccessВлияние параметров метода PECVD на рост углеродных нанотрубок для устройств нанопьезотроники
Author(s) -
N N Rudyk,
O. I. Il’in,
M. V. Il’ina,
С.А. Хубежов,
Alexander A. Fedotov,
О.А. Агеев
Publication year - 2021
Publication title -
žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-748X
pISSN - 0044-4642
DOI - 10.21883/jtf.2021.10.51365.96-21
Subject(s) - materials science , carbon nanotube , piezoelectricity , electrical resistivity and conductivity , layer (electronics) , nanotechnology , composite material , electrical engineering , engineering
The results of experimental studies of the influence of the growth temperature and the thickness of the catalytic layer on the geometric and structural parameters of carbon nanotubes (CNTs) are presented. It is shown that the use of a TiN-based sublayer makes it possible to provide a low resistivity during the direct growth of CNTs on a conducting contact. It was found that for the formation of the best piezoelectric response, it is necessary to form the most defective CNTs. It is shown that the degree of defectiveness of CNTs can be controlled during their growth. A relationship has been established between the geometric and structural parameters of CNTs that affect the piezoelectric response. The potential applicability of CNTs for the creation of nanopiezotronic devices (nanogenerators, energy nanocarvesters) on their basis is shown.