Open AccessФормирование наноструктурированных пленок MoS-=SUB=-2-=/SUB=-, WS-=SUB=-2-=/SUB=-, MoO-=SUB=-2-=/SUB=- и гетероструктур на их основе
Author(s) -
А. Б. Логинов,
Р. Р. Исмагилов,
Sofya N. BokovaSirosh,
I. V. Bozhev,
E. D. Obraztsova,
Б. А. Логинов,
A. N. Obraztsov
Publication year - 2021
Publication title -
žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-748X
pISSN - 0044-4642
DOI - 10.21883/jtf.2021.10.51364.102-21
Subject(s) - crystallite , materials science , chemical vapor deposition , thin film , layer (electronics) , deposition (geology) , composite material , crystallography , chemical engineering , nanotechnology , metallurgy , chemistry , paleontology , sediment , engineering , biology
In this work thin film coatings based on WS2, MoS2, MoO2 and their composites were synthesized, morphological and structural properties of deposited coatings were studied. Chemical vapor deposition with heated MoO3, WO3, S powder as precursors was used. Dependence of structural and morphological properties, chemical composition of deposited films on parameters of synthesis was defined. Films of vertically aligned 10 nm thick plate crystals consisting both of pure MoO2 and MoO2 covered with thin MoS2 layer were obtained. Formation of polycrystalline films of regular triangular shaped WS2 and uniform continuous 20 nm thick WS2 films with covering area of 2x2mm has also been observed. In this work we also report about synthesis of films consisting of regular triangular shaped WS2 crystals and MoS2 irregularly shaped crystals overlapping each other.