Open AccessЗависимость механических и трибологических свойств a-C : H : SiO-=SUB=-x-=/SUB=--пленок от амплитуды напряжения смещения подложки
Author(s) -
А. С. Гренадеров,
Anatoliy A. Soloviov,
К. В. Оскомов,
M.O. Zhulkov
Publication year - 2021
Publication title -
žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-748X
pISSN - 0044-4642
DOI - 10.21883/jtf.2021.08.51106.15-21
Subject(s) - nanoindentation , materials science , tribometer , tribology , substrate (aquarium) , scanning electron microscope , biasing , analytical chemistry (journal) , chemical vapor deposition , raman spectroscopy , indentation hardness , composite material , metallurgy , microstructure , nanotechnology , voltage , optics , oceanography , physics , chemistry , chromatography , quantum mechanics , geology
The paper presents the AISI 316L stainless steel surface modification by plasma-assisted chemical vapor deposition of a-C:H:SiOx film using the pulsed bipolar substrate bias voltage. The mechanical and tribological properties of the a-C:H:SiOx film and the steel surface are examined using the nanoindentation method and the pin-on-disk tribometer, respectively. The optimum value is obtained for the amplitude of the negative pulse of the bipolar bias voltage, when the hardness of the a-C:H:SiOx film is high (19±2 GPa). This hardness value is 3.5 times greater, than the hardness of the AISI 316L steel surface (5.5±0.1 GPa). At the same time, the coefficient of friction of the film is low (0.08), which is 9 times lower than that of the steel (0.72). The wear rate values are found to be 8.5×10-7 and 3.7×10-5 mm3N-1m-1 for the coated and uncoated steel, respectively. The structure and composition of the obtained films are studied by Raman spectroscopy and scanning electron microscopy.