Open AccessМеханизмы возникновения напряжений в тонких пленках и покрытиях
Author(s) -
А.Р. Шугуров,
А.В. Панин
Publication year - 2020
Publication title -
žurnal tehničeskoj fiziki
Language(s) - Russian
Resource type - Journals
eISSN - 1726-748X
pISSN - 0044-4642
DOI - 10.21883/jtf.2020.12.50112.38-20
Subject(s) - materials science , crystallite , nucleation , coalescence (physics) , amorphous solid , thin film , composite material , epitaxy , stress (linguistics) , microstructure , ultimate tensile strength , crystal growth , heterojunction , crystallography , nanotechnology , metallurgy , chemistry , optoelectronics , thermodynamics , physics , linguistics , philosophy , layer (electronics) , astrobiology