Open AccessВлияние науглероживания вольфрама на активацию газа при синтезе алмазных структур
Author(s) -
А.А. Емельянов,
М.Ю. Плотников,
И.Б. Юдин
Publication year - 2019
Publication title -
žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-748X
pISSN - 0044-4642
DOI - 10.21883/jtf.2019.12.48488.127-18
Subject(s) - tungsten , deposition (geology) , coaxial , materials science , methane , hydrogen , decarburization , volumetric flow rate , jet (fluid) , metallurgy , chemistry , mechanics , physics , geology , mechanical engineering , engineering , paleontology , organic chemistry , sediment
In order to develop a gas-jet method of diamond structures deposition, the flow of hydrogen and methane mixture through heated tungsten coaxial cylindrical channels with a built-in tungsten spiral is studied. The main attention is paid to the study of the carburization of tungsten surfaces during gas-jet deposition and the effect of carburization on the deposition rate and the morphology of the deposited coatings. A series of experiments to study the carburization of tungsten surfaces under different conditions for feeding a mixture of hydrogen and methane is performed. The flow parameters are investigated by the direct simulation Monte Carlo method. The possible ways of delivering methane and its fragments onto the surface of the spiral are determined.