Open AccessОшибки измерений интерферометров с дифракционной волной сравнения
Author(s) -
А.А. Ахсахалян,
Д.А. Гаврилин,
И.В. Малышев,
Н.Н. Салащенко,
М.Н. Торопов,
Б.А. Уласевич,
Н.Н. Цыбин,
Н.И. Чхало
Publication year - 2019
Publication title -
žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-748X
pISSN - 0044-4642
DOI - 10.21883/jtf.2019.11.48346.115-19
Subject(s) - interferometry , optics , diffraction , physics , adaptive optics , aperture (computer memory) , computer science , acoustics
The paper describes the experimental stand and the results of studies of aberrations of the sources of a reference spherical wave (SRSW) based on a single-mode optical fiber with a sub-wave output aperture using the optical part of the recording system (OPRS). SRSW and OPRS are being developed for a referenceless interferometer with a diffraction reference wave. The technique to minimize measurement errors is described. Developed SRSW and OPRS provide subnanometer optics measurement accuracy. The possibilities of improving the accuracy of interferometer measurements to the picometer level are discussed.