Open AccessВлияние термического отжига на свойства многослойных зеркал Mo/Be
Author(s) -
R. M. Smertin,
С. А. Гарахин,
C.Ю. Зуев,
A. N. Nechaĭ,
Н.В. Полковников,
Н. Н. Салащенко,
М. В. Свечников,
Mewael Sertsu,
Andréy Sokolov,
Н. И. Чхало,
F. Schäfers,
П.А. Юнин
Publication year - 2019
Publication title -
žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-748X
pISSN - 0044-4642
DOI - 10.21883/jtf.2019.11.48345.136-19
Subject(s) - annealing (glass) , materials science , optics , thermal , molybdenum , exponential function , analytical chemistry (journal) , composite material , metallurgy , thermodynamics , chemistry , mathematics , physics , mathematical analysis , chromatography
The influence of thermal action on X-ray optics performance and structure of films and transition regions in multilayer Mo/Be mirrors optimized for a reflection maximum in the interval 11.2–11.4 nm at normal incidence has been considered. The annealing temperature reached 300°C and the annealing time was 1 and 4 h. It has been shown that after thermal annealing in vacuum for 1 h at 300°C, the reflection coefficient rises; however, when the annealing time grows to 4 h, it drops. Grains in molybdenum films become finer, and the profiles of transition regions change from exponential to linear. The period of multilayer mirrors has remained the same under all annealing conditions.