Open AccessМногослойные зеркала Ag/Y для спектрального диапазона 9-11 nm
Author(s) -
Д.С. Квашенников,
С.Ю. Зуев,
В.Н. Полковников,
Н.Н. Салащенко,
Н.И. Чхало,
F. Delmotte,
E. Meltchakov
Publication year - 2019
Publication title -
žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-748X
pISSN - 0044-4642
DOI - 10.21883/jtf.2019.11.48343.129-19
Subject(s) - materials science , reflection (computer programming) , wavelength , stability (learning theory) , optics , range (aeronautics) , optoelectronics , crystallography , chemistry , physics , composite material , machine learning , computer science , programming language
Multilayer Ag/Y mirrors intended for the spectral range of 9–11 nm have been investigated. The parameters of mirrors, specifically, the thicknesses of transition layers, have been determined. The efficiency of B_4C and Si barrier layers has been demonstrated. It has been shown that the properties of structures like Ag/Y and Ag/Y with B_4C and Si barriers layers have poor temporal stability. The highest reflection coefficient of 18% at a wavelength of 9.34 nm, has been observed for the Ag/Si/Y structure. The same structure has the best temporal stability.