Open AccessИсследование оптических, механических и термических свойств свободновисящих пленок на основе нанокомпозитных материалов MoSi-=SUB=-2-=/SUB=-N-=SUB=-x-=/SUB=- и ZrSi-=SUB=-2-=/SUB=-N-=SUB=-y-=/SUB=-
Author(s) -
С.Ю. Зуев,
А.Я. Лопатин,
V. I. Luchin,
Н. Н. Салащенко,
Д.А. Татарский,
N. N. Tsybin,
Н. И. Чхало
Publication year - 2019
Publication title -
žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-748X
pISSN - 0044-4642
DOI - 10.21883/jtf.2019.11.48328.114-19
Subject(s) - materials science , nitriding , molybdenum , thermal stability , nitrogen , zirconium , amorphous solid , analytical chemistry (journal) , ultimate tensile strength , degradation (telecommunications) , crystallization , transmittance , composite material , metallurgy , chemical engineering , optoelectronics , layer (electronics) , crystallography , chemistry , electronic engineering , organic chemistry , chromatography , engineering
The optical, mechanical, and thermal properties of freestanding films based on nitrided molybdenum and zirconium disilicides were investigated. It has been shown that nitriding of silicides leads to a significant increase in the thermal stability of the films. So, if crystallization of initially amorphous freestanding MoSi2 or ZrSi2 films is observed at temperatures of 330-370°C, the introduction of nitrogen into the film makes it possible to increase the temperature up to 600-700°С at which MoSi2Nx and ZrSi2Ny (at least for x ≥ 0.25, y ≥ 1.3) films can be used for many hours when heated under vacuum. The study of mechanical tensile strength showed that the ultimate strength is weakly dependent on the nitrogen content in MoSi2Nx films (0 ≤ x ≤ 0.55). Comparison of the properties of MoSi2Nx and ZrSi2Ny films obtained by the magnetron method at the same nitrogen partial pressure demonstrated that at similar values of the transmittance at 13.5 nm, nitrated ZrSi2 films are more effective as protective coatings (less susceptible to oxidation and more resistant to degradation at high temperatures).