Open AccessЭмиссионные свойства лазерной плазмы при ее возбуждении на молекулярно-кластерных струях углекислоты
Author(s) -
А.Н. Нечай,
А.А. Перекалов,
Н.И. Чхало,
Н.Н. Салащенко
Publication year - 2019
Publication title -
žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-748X
pISSN - 0044-4642
DOI - 10.21883/jtf.2019.11.48324.131-19
Subject(s) - extreme ultraviolet lithography , extreme ultraviolet , supersonic speed , nozzle , jet (fluid) , radiation , physics , outflow , conical surface , plasma , astrophysics , atomic physics , optics , laser , materials science , nuclear physics , mechanics , meteorology , composite material , thermodynamics
The paper presents the results of studies of a gas-jet laser-plasma source of extreme ultraviolet radiation (EUV) based on a conical supersonic nozzle. Molecular cluster CO2 jets were used as targets. By changing the parameters of the gas at the nozzle entrance, various modes of gas outflow were obtained, the influence of these modes on the emission and technical characteristics of the radiation source was studied. An experimentally shown is an increase in EUV emission with an increase in the amount of clustered matter in the jet. A possible relationship was observed between the increase in the intensity of EUV radiation with an increase in the number of clustered matter in the jet.