Open AccessИонно-оптическая система источника ионов с фокусировкой по энергии в формируемом пучке
Author(s) -
И.А. Аверин,
А.С. Бердников,
С.В. Масюкевич,
Н.С. Самсонова,
Н.Р. Галль,
Л.Н. Галль
Publication year - 2019
Publication title -
žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-748X
pISSN - 0044-4642
DOI - 10.21883/jtf.2019.04.47321.222-18
Subject(s) - ion , chromatic aberration , ion source , achromatic lens , ion beam , mass spectrometry , optics , ion beam deposition , atomic physics , beam (structure) , physics , materials science , chromatic scale , chemistry , quantum mechanics
Ways to reduce ion beam intensity losses in a mass spectrometric ion source, which are caused by chromatic aberration of its immersion ion-optical system, are considered. These losses are rather significant in forming a beam from ions with a large energy spread. The reduction of aberration losses is especially important when ion sources are used jointly with mass analyzers with energy focusing. It is shown that these losses can be reduced significantly by using a new type of ion-optical system of the ion source, which includes achromatic elements. A special method for calculating such elements is given. Computer simulations have shown high efficiency of such elements in the ion-optical path of ion sources of mass spectrometers.