Open AccessСтруктурные и магнитные свойства систем Al-=SUB=-2-=/SUB=-O-=SUB=-3-=/SUB=-/Ge-p/Al-=SUB=-2-=/SUB=-O-=SUB=-3-=/SUB=-/Co
Author(s) -
Александр В. Кобяков,
И. А. Турпанов,
Г. С. Патрин,
Р. Ю. Руденко,
В. И. Юшков,
Н. Н. Косырев
Publication year - 2019
Publication title -
žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-748X
pISSN - 0044-4642
DOI - 10.21883/jtf.2019.02.47082.198-18
Subject(s) - sputtering , materials science , deposition (geology) , cobalt , analytical chemistry (journal) , layer (electronics) , heterojunction , plasma , buffer (optical fiber) , surface roughness , sputter deposition , ion , surface finish , thin film , chemistry , optoelectronics , nanotechnology , metallurgy , composite material , physics , paleontology , telecommunications , organic chemistry , chromatography , quantum mechanics , sediment , computer science , biology
The Al_2O_3/Ge- p /Al_2O_3/Co system with an Al_2O_3 buffer layer deposited by ion-plasma sputtering has been experimentally investigated. The dependences of the magnetic properties of cobalt on the rate of its deposition by ion-plasma sputtering and rate of deposition of preceding layers have been established. It is shown that the technique used to obtain buffer layers can significantly reduce the surface roughness of the next layers. The obtained buffer layers can be used as artificial substrates for growing heterostructures with tunnel junctions.