Open AccessВлияние переходных металлов на диэлектрические свойства алмазоподобных кремний-углеродных пленок
Author(s) -
Alexey Popov,
А. Д. Баринов,
V. M. Emets,
Р.А. Кастро Арта,
Alexander V. Kolobov,
A. A. Koov,
A. V. Ovcharov,
Т. С. Чуканова
Publication year - 2021
Publication title -
fizika tverdogo tela
Language(s) - English
Resource type - Journals
eISSN - 1726-7498
pISSN - 0367-3294
DOI - 10.21883/ftt.2021.11.51586.132
Subject(s) - dielectric , materials science , electrical resistivity and conductivity , dielectric loss , conductivity , diamond , dissipation factor , silicon , metal , carbon fibers , decomposition , analytical chemistry (journal) , composite material , chemistry , metallurgy , organic chemistry , composite number , electrical engineering , optoelectronics , engineering
Investigation of transition metals effect on the phase composition, electrical and dielectric properties of diamond-like silicon-carbon films prepared by the plasma-chemical decomposition of polyphenylmethylsiloxane have been carried out. Frequency, temperature and concentration dependences of these properties are obtained. It is shown that an increase in the metal concentration in the film leads to a continuous increase in the electrical conductivity, while the concentration dependences of the dielectric constant and the dielectric loss tangent have a minimum at metal concentrations of 0.5–2 at.%. Possible reasons for this phenomenon are analyzed.