Open AccessСтруктурные характеристики выращенных методом RF-катодного напыления тонких пленок Sr-=SUB=-0.61-=/SUB=-Ba-=SUB=-0.39-=/SUB=-Nb-=SUB=-2-=/SUB=-O-=SUB=-6-=/SUB=-/ MgO(001)
Author(s) -
А. В. Павленко,
Д.В. Стрюков,
Л. И. Ивлева,
Alessandro Kovtun,
K. M. Zhidel,
P. A. Lykov
Publication year - 2021
Publication title -
fizika tverdogo tela
Language(s) - English
Resource type - Journals
eISSN - 1726-7498
pISSN - 0367-3294
DOI - 10.21883/ftt.2021.02.50473.174
Subject(s) - materials science , barium , substrate (aquarium) , dielectric , impurity , strontium , diffraction , sputtering , epitaxy , thin film , analytical chemistry (journal) , composite material , optoelectronics , optics , layer (electronics) , metallurgy , nanotechnology , chemistry , organic chemistry , chromatography , geology , oceanography , physics
Thin films of the congruent composition of the barium-strontium niobates solid solutions Sr0.61Ba0.39Nb2O6 (SBN: 61) with thicknesses from 30 to 630 nm on a MgO (001) substrate were fabricated by RF-cathode sputtering in an oxygen atmosphere. By X-ray diffraction it was found that the films are epitaxial and there are no impurities in them. In the films, there is practically no unit cell deformation in the interface plane and tensile strain is present in the normal to the surface direction, which increases with decreasing film thickness. Dielectric measurements indicate high tunability in the films.