Open AccessСтруктурные свойства тонких пленок, полученных магнетронным распылением полидиацетилена
Author(s) -
О.А. Стрелецкий,
И.А. Завидовский,
О.Ю. Нищак,
А.Н. Щеголихин,
Н.Ф. Савченко
Publication year - 2020
Publication title -
fizika tverdogo tela
Language(s) - English
Resource type - Journals
eISSN - 1726-7498
pISSN - 0367-3294
DOI - 10.21883/ftt.2020.11.50073.113
Subject(s) - x ray photoelectron spectroscopy , raman spectroscopy , monocrystalline silicon , transmission electron microscopy , materials science , sputtering , spectroscopy , analytical chemistry (journal) , nanotechnology , chemistry , chemical engineering , optoelectronics , silicon , optics , thin film , physics , chromatography , quantum mechanics , engineering
In the work we studied films synthesized by RF-sputtering of monocrystalline polydiacetylene (PDA). Investigations of the structure were carried out by Raman spectroscopy, transmission electron microscopy, X-ray photoelectron spectroscopy. We showed that obtained films had heterogeneous structure containing nanoscaled inclusions of initial PDA and irregularly distributed sp/sp2 fragments of carbon chains.