Open AccessВлияние температуры синтеза на микроструктуру и электрофизические свойства пленок BST 80/20
Author(s) -
М. С. Афанасьев,
Д. А. Киселев,
С. А. Левашов,
A. A. Sivov,
Г В Чучева
Publication year - 2019
Publication title -
fizika tverdogo tela
Language(s) - English
Resource type - Journals
eISSN - 1726-7498
pISSN - 0367-3294
DOI - 10.21883/ftt.2019.10.48275.463
Subject(s) - ferroelectricity , materials science , microstructure , silicon , composite material , optoelectronics , dielectric
The paper shows the effect of synthesis temperature on the microstructure and electrophysical properties of ferroelectric films of composition Ba0.8Sr0.2TiO3 when formed on silicon substrates with a platinum sublayer. On the basis of electrophysical and topographical measurements, a conclusion is made about the effect of the temperature of synthesis of ferroelectric films on their properties.