Open AccessИзменение элементного состава тонких пленок цирконата-титаната свинца в процессе ионно-плазменного осаждения: эксперимент и моделирование
Author(s) -
В.А. Вольпяс,
А.Б. Козырев,
А.В. Тумаркин,
Д.М. Долгинцев,
В.П. Пронин,
Е.Ю. Каптелов,
С.В. Сенкевич,
И.П. Пронин
Publication year - 2019
Publication title -
fizika tverdogo tela
Language(s) - English
Resource type - Journals
eISSN - 1726-7498
pISSN - 0367-3294
DOI - 10.21883/ftt.2019.07.47838.388
Subject(s) - materials science , thin film , sputter deposition , deposition (geology) , diffusion , analytical chemistry (journal) , sputtering , ion , thermodynamics , nanotechnology , chemistry , paleontology , physics , organic chemistry , chromatography , sediment , biology
The element composition modification is experimentally studied in PZT thin films obtained via the RF magnetron sputtering with variable working gas pressure. The experimental data were interpreted through the statistic simulation of thermalization and diffusion of sprayed Pb, Zr, and Ti atoms during the ion-plasma deposition of PZT thin films. The simulation data are shown to adequately describe (within the limits of 5%) the change in element composition at various pressures of the gas environment. The study conducted enables one to produce PZT thin films with a set element composition, which is essential for optimizing the electric and physical properties of solid solutions at the morphotropic phase boundary.