Open AccessВлияние материала подложки на структуру и электрофизические свойства тонких пленок Ba-=SUB=-x-=/SUB=-Sr-=SUB=-1-x-=/SUB=-TiO-=SUB=-3-=/SUB=-
Author(s) -
М. С. Афанасьев,
Д. А. Киселев,
С. А. Левашов,
В. А. Лузанов,
В. Г. Нарышкина,
A. A. Sivov,
Г В Чучева,
А.Э. Набиев
Publication year - 2018
Publication title -
fizika tverdogo tela
Language(s) - English
Resource type - Journals
eISSN - 1726-7498
pISSN - 0367-3294
DOI - 10.21883/ftt.2018.05.45792.320
Subject(s) - crystallite , materials science , thin film , ferroelectricity , conductivity , platinum , surface finish , analytical chemistry (journal) , substrate (aquarium) , polarization (electrochemistry) , surface roughness , mineralogy , dielectric , nanotechnology , composite material , optoelectronics , chemistry , metallurgy , catalysis , biochemistry , oceanography , chromatography , geology
The high-frequency spraying method has been used to produce Ba_ x Sr_1– x TiO_3 thin films on (111)Pt/(100)Si and SiOx/(100)Si substrates. The synthesized films have proven to be single-phase with a polycrystalline structure. In this paper, we show the influence of the platinum sublayer on such parameters as roughness, mean size of grains, and the local polarization of Ba_ x Sr_1– x TiO_3 thin films. Possible mechanisms of the obtained results related to the intragrain conductivity and the nature of interaction of a ferroelectric film with its substrate are discussed.