Open AccessРентгеновская фотоэлектронная спектроскопия пленок стабилизированного диоксида циркония со встроенными наночастицами Au, сформированными в процессе облучения ионами золота
Author(s) -
С.Ю. Зубков,
И.Н. Антонов,
О.Н. Горшков,
А.П. Касаткин,
Р.Н. Крюков,
Д.Е. Николичев,
Д.А. Павлов,
М.Е. Шенина
Publication year - 2018
Publication title -
fizika tverdogo tela
Language(s) - English
Resource type - Journals
eISSN - 1726-7498
pISSN - 0367-3294
DOI - 10.21883/ftt.2018.03.45566.249
Subject(s) - x ray photoelectron spectroscopy , transmission electron microscopy , zirconium , cubic zirconia , materials science , annealing (glass) , nanoparticle , ion , irradiation , analytical chemistry (journal) , nuclear chemistry , chemical engineering , nanotechnology , chemistry , ceramic , metallurgy , organic chemistry , physics , nuclear physics , engineering
Nanosized films of stabilized zirconia with Au nanoparticles formed by implanting Au ions are studied by X-ray photoelectron spectroscopy and transmission electron microscopy. The effect of irradiation of films with Au ions and postimplantation annealing on the distribution of chemical elements and zirconium- containing ZrO_ x compounds over the depth of the films is studied. Based on the data on the dimensional shift of the Au 4 f photoelectron line, the average value of the nanoparticle size is determined.