Open AccessЭлектрохимическое осаждение контактных материалов в постростовой технологии фотоэлектрических преобразователей
Author(s) -
А.В. Малевская,
Н.Д. Ильинская,
Д.А. Малевский,
П.В. Покровский
Publication year - 2022
Publication title -
fizika i tehnika poluprovodnikov
Language(s) - English
Resource type - Journals
eISSN - 1726-7315
pISSN - 0015-3222
DOI - 10.21883/ftp.2022.03.52127.9774
Subject(s) - ohmic contact , materials science , deposition (geology) , fabrication , galvanic cell , anode , heterojunction , photovoltaic system , optoelectronics , electrolyte , nanotechnology , metallurgy , electrical engineering , electrode , engineering , chemistry , geology , medicine , paleontology , alternative medicine , layer (electronics) , pathology , sediment
Investigations and modeling of ohmic contacts electrochemical deposition process in postgrowth technology of photovoltaic converters fabrication have been carried out. The technology of Ag/Au contact system galvanic deposition at vertical and horizontal position of heterostructure and anode in the electrolyte has been developed. The increase of contact system deposition uniformity up to ∼ 95% at the thickness of contact bus-bars ∼ 5 µm on the heterostructure area with 4 inch diameter has been archived.