Open AccessXVII Межгосударственная конференция Термоэлектрики и их применения --- 2021" (ISCTA 2021 Санкт-Петербург, 13-16 сентября, 2021 Получение и исследование омических контактов с высокой адгезией к термоэлементам
Author(s) -
М.Ю. Штерн,
Андрей Олегович Козлов,
Ю.И. Штерн,
М.С. Рогачев,
Е.П. Корчагин,
Б.Р. Мустафоев,
Anežka Dědková
Publication year - 2021
Publication title -
fizika i tehnika poluprovodnikov
Language(s) - English
Resource type - Journals
eISSN - 1726-7315
pISSN - 0015-3222
DOI - 10.21883/ftp.2021.12.51689.01
Subject(s) - materials science , sputtering , composite material , adhesive , thermoelectric effect , surface roughness , electrical resistivity and conductivity , surface finish , layer (electronics) , thin film , nanotechnology , physics , engineering , electrical engineering , thermodynamics
The factors determining the adhesive strength of film coatings are considered. The functions of contacts in thermoelements used in a wide temperature range were determined. It was established that the adhesive strength of contact is a limiting factor in the mechanical strength of a thermoelement. A method of vacuum sputtering of thin-film contacts was proposed, including the surface treatment of samples of thermoelectric materials. The presence of a transition layer in the area of the metal - thermoelectric material contact, formed during the interaction of the metal with elements of the thermoelectric material, was established. The dependence of the adhesive strength of film contact on roughness of surface on which they formed was established. Thermal stable contacts for thermoelements with low resistivity of the order of 10-9 Ohm•m2 and high adhesion strength of at least 12 MPa were obtained by ion-plasma sputtering.