Open AccessФормирование и исследование оптических свойств локально растянутых Ge микроструктур, встроенных в резонаторы
Author(s) -
Д.В. Юрасов,
Н.А. Байдакова,
В.А. Вербус,
Н.С. Гусев,
Е.Е. Морозова,
Д.В. Шенгуров,
А.Н. Яблонский,
А.В. Новиков
Publication year - 2021
Publication title -
fizika i tehnika poluprovodnikov
Language(s) - English
Resource type - Journals
eISSN - 1726-7315
pISSN - 0015-3222
DOI - 10.21883/ftp.2021.05.50830.9584
Subject(s) - photoluminescence , materials science , redistribution (election) , optoelectronics , electric field , physics , politics , political science , law , quantum mechanics
In this work, formation of locally tensile strained Ge structures (micro-bridges) on SOI substrates embedded into microcavities is reported and their optical properties are discussed. The cavity compatible with the shape of the active region was designed in such a way as to provide an effective localization of the electromagnetic field in the active region of the structure, as well as to minimize the strain redistribution due to the cavity formation. Micro-photoluminescence (PL) studies have shown a remarkable enhancement of the PL intensity for the locally strained areas as compared to the initial Ge film. It was shown that the formation of a microcavity leads to a decrease in the maximum strain in the active region of the structure, but provides an overall increase in the PL intensity.