Open AccessСинтез наночастиц карбида кремния методом лазерного пиролиза смеси моносилана и ацетилена
Author(s) -
И.А. Ершов,
Л.Д. Исхакова,
В.И. Красовский,
Ф.О. Милович,
С.И. Расмагин,
В.И. Пустовой
Publication year - 2020
Publication title -
fizika i tehnika poluprovodnikov
Language(s) - English
Resource type - Journals
eISSN - 1726-7315
pISSN - 0015-3222
DOI - 10.21883/ftp.2020.11.50094.9476
Subject(s) - silicon carbide , materials science , nanoparticle , chemical engineering , silicon , carbide , laser ablation , phase (matter) , laser , nanotechnology , analytical chemistry (journal) , composite material , chemistry , optoelectronics , optics , organic chemistry , physics , engineering
The conditions of the laser-enhanced synthesis reaction of silicon carbide nanoparticles are determined and the nanoparticles are characterized. The gas-phase reaction of laser synthesis of SiC particles is observed at SiH4/C2H2 flow ratio in the range of 1.6-3.2. The temperature in the reaction zone was ~1400--1500ºC. Silicon carbide nanoparticles ~6 nm in diameter are produced and their composition is studied.