Open AccessВлияние водорода на импеданс структур Pd/оксид/InP
Author(s) -
V. A. Shutaev,
Е. А. Гребенщикова,
V. G. Sidorov,
М.Е. Компан,
Ю.П. Яковлев
Publication year - 2020
Publication title -
fizika i tehnika poluprovodnikov
Language(s) - English
Resource type - Journals
eISSN - 1726-7315
pISSN - 0015-3222
DOI - 10.21883/ftp.2020.06.49383.9359
Subject(s) - capacitance , hydrogen , oxide , materials science , nitrogen , hysteresis , polarization (electrochemistry) , electrical impedance , analytical chemistry (journal) , ion , atomic physics , molecular physics , chemistry , condensed matter physics , electrical engineering , electrode , physics , organic chemistry , engineering , chromatography , metallurgy
The impedance and capacitance properties of Pd/oxide/InP structures within the frequency range from 0.1 Hz to 10 kHz in air and in gaseous hydrogen–nitrogen mixture at 300 K have been studied. The characteristics of investigated structures can be characterized by parallel RC circuit model with the connected serial resistance. In hydrogen medium the active resistance of the structures decreases by 3 orders of magnitude and the capacitance increases by 1–3 orders of magnitude depending on frequency that is due probably to the positive charged centers formed in the oxide layer. In hydrogen medium the hysteresis has been found on CV-characteristics of the structures that may be explained by ion polarization of formed centers. It is shown that measured in electron units the full charge of the centers practically coincides with the quantity of hydrogen atoms absorbed by palladium.