Open AccessПолучение тонких пленок теллурида висмута на полиимидных подложках методом импульсного лазерного осаждения
Author(s) -
А.Е. Шупенев,
И.С. Коршунов,
А.Г. Григорьянц
Publication year - 2020
Publication title -
fizika i tehnika poluprovodnikov
Language(s) - English
Resource type - Journals
eISSN - 1726-7315
pISSN - 0015-3222
DOI - 10.21883/ftp.2020.03.49038.9196
Subject(s) - seebeck coefficient , materials science , thermoelectric effect , electrical resistivity and conductivity , substrate (aquarium) , thin film , pulsed laser deposition , thermoelectric materials , polyimide , analytical chemistry (journal) , deposition (geology) , optoelectronics , composite material , nanotechnology , thermal conductivity , chemistry , electrical engineering , thermodynamics , layer (electronics) , paleontology , oceanography , physics , chromatography , sediment , geology , biology , engineering
The peculiarities of obtaining p -Bi_0.5Sb_1.5Te_3 and n -Bi_2Te_2.7Se_0.3 thin thermoelectric films with a thickness of about 300 nm grown on a polyimide substrate by the pulsed-laser-deposition method are reported. The influence of the growth temperature, pressure and target-to-substrate distance on the film’s thermoelectric properties is investigated. Thermoelectric p - and n -type films exhibit a high Seebeck coefficient of 220 and –200 μV/K and low electrical power factors of 9.7 and 5.0 μW/(cm K^2) respectively due to the relatively high electrical resistances of the films.