Open AccessМолекулярно-пучковая эпитаксия двухмерных слоев GaSe на подложках GaAs(001) и GaAs(112): структурные и оптические свойства
Author(s) -
S. V. Sorokin,
P. S. Avdienko,
I. V. Sedova,
Д. А. Кириленко,
М.А. Яговкина,
A. N. Smirnov,
V. I. Davydov,
С. В. Иванов
Publication year - 2019
Publication title -
fizika i tehnika poluprovodnikov
Language(s) - English
Resource type - Journals
eISSN - 1726-7315
pISSN - 0015-3222
DOI - 10.21883/ftp.2019.08.48010.9103
Subject(s) - materials science , molecular beam epitaxy , diffraction , transmission electron microscopy , raman spectroscopy , substrate (aquarium) , flux (metallurgy) , electron diffraction , epitaxy , spectroscopy , optoelectronics , crystallography , optics , chemistry , layer (electronics) , nanotechnology , oceanography , physics , quantum mechanics , geology , metallurgy
The results of studies of the structural and optical properties of two-dimensional GaSe layers grown by molecular-beam epitaxy on GaAs(001) and GaAs(112) substrates using a valve cracking cell for the Se source are reported. The influence of the MBE growth parameters (the substrate temperature, Ga flux intensity, Se/Ga incident flux ratio) on the surface morphology of the layers is studied. By means of transmission electron microscopy, electron diffraction technique, and Raman spectroscopy, it is shown that the structure of the GaSe layers corresponds to the γ-GaSe polytype. From X-ray diffraction analysis, it is established that there exist α-Ga_2Se_3 inclusions in the GaSe layers grown under conditions of high enrichment of the growth surface with Se.