Open AccessТемплатный синтез монодисперсных сферических нанопористых частиц кремния субмикронного размера
Author(s) -
Д.А. Курдюков,
Н.А. Феоктистов,
Д.А. Кириленко,
А.Н. Смирнов,
В.Ю. Давыдов,
В.Г. Голубев
Publication year - 2019
Publication title -
fizika i tehnika poluprovodnikov
Language(s) - English
Resource type - Journals
eISSN - 1726-7315
pISSN - 0015-3222
DOI - 10.21883/ftp.2019.08.47997.9116
Subject(s) - materials science , dispersity , nanoporous , silicon , mesoporous material , thermal decomposition , chemical engineering , photoluminescence , etching (microfabrication) , specific surface area , mesoporous silica , nanotechnology , mineralogy , analytical chemistry (journal) , optoelectronics , chemistry , polymer chemistry , organic chemistry , catalysis , layer (electronics) , engineering
Monodisperse spherical nanoporous silicon ( np -Si) particles of submicrometer size are fabricated with mesoporous silica particles as a template. Silicon is synthesized within the mesopores of monodisperse silica particles by the thermal decomposition of monosilane. Then, the template material ( a -SiO_2) is removed by wet etching. The particles obtained have a small root-mean-square size scatter (no more than 10%) and large specific surface area (250 m^2 g^–1) and pore volume (0.5 cm^3 g^–1). It is shown that np -Si particles exhibit photoluminescence in the visible and near-IR (infrared) spectral ranges.