Open AccessИсследование структурных и морфологических свойств HPHT алмазных подложек
Author(s) -
П.А. Юнин,
П. В. Волков,
Ю Н Дроздов,
А.В. Колядин,
С. А. Королев,
Д.Б. Радищев,
Е.А. Суровегина,
V. I. Shashkin
Publication year - 2018
Publication title -
fizika i tehnika poluprovodnikov
Language(s) - English
Resource type - Journals
eISSN - 1726-7315
pISSN - 0015-3222
DOI - 10.21883/ftp.2018.11.46592.14
Subject(s) - diamond , epitaxy , chemical vapor deposition , materials science , characterization (materials science) , substrate (aquarium) , optical microscope , diffraction , diamond type , atomic force microscopy , interference microscopy , nanotechnology , microscopy , optoelectronics , material properties of diamond , optics , composite material , scanning electron microscope , geology , layer (electronics) , oceanography , physics
The morphological and structural properties of a series of high-pressure high-temperature (HPHT) single-crystal diamond substrates are comprehensively studied by white-light optical interference microscopy, atomic-force microscopy, and X-ray diffraction analysis. Procedures that provide a means for characterizing the substrate parameters most critical for epitaxial application with the laboratory equipment are described. It is shown that the jewelry-type characterization of diamond substrates is insufficient to assess the possibility of their use for the epitaxial growth of chemical-vapor-deposited (CVD) diamond.