Open AccessМодификация ферромагнитных свойств тонких пленок Si-=SUB=-1-x-=/SUB=-Mn-=SUB=-x-=/SUB=-, синтезируемых методом импульсного лазерного осаждения при изменении давления буферного газа
Author(s) -
О. А. Новодворский,
В. А. Михалевский,
Д. Е. Гусев,
А. А. Лотин,
Л. С. Паршина,
О. Д. Храмова,
Е. А. Черебыло,
А. Б. Дровосеков,
V. V. Rylkov,
С. Н. Николаев,
К. Ю. Черноглазов,
К. И. Маслаков
Publication year - 2018
Publication title -
fizika i tehnika poluprovodnikov
Language(s) - English
Resource type - Journals
eISSN - 1726-7315
pISSN - 0015-3222
DOI - 10.21883/ftp.2018.11.46590.12
Subject(s) - argon , materials science , analytical chemistry (journal) , sputtering , thin film , curie temperature , laser ablation , ferromagnetism , substrate (aquarium) , pulsed laser deposition , buffer gas , laser , atomic physics , chemistry , optics , condensed matter physics , nanotechnology , physics , oceanography , chromatography , geology
A series of thin films of Si_1 –_ x Mn_ x alloys with a thickness from 50 to 100 nm grown by pulsed laser deposition on an Al_2O_3 substrate in vacuum and in an argon atmosphere is investigated. The significant effect of the buffer-gas pressure in the sputtering chamber on the structural and magnetic homogeneity of the obtained films is shown. The conditions for the formation of a ferromagnetic phase with a high Curie temperature (>300 K) in the samples are studied. With the use of the Langmuir probe method, the threshold of ablation of a MnSi target by second harmonic radiation (λ = 532 nm) of a Nd:YAG Q -switch laser is determined. The time-of-flight curves for the plume ions are obtained with a change in the energy density at the target and argon pressure in the sputtering chamber. A nonmonotonic dependence of the probe time-of-flight signal amplitude on the argon pressure is established for high-energy particles of the plume.