Open AccessВлияние условий синтеза и наночастиц олова на структуру и свойства композитных тонких пленок a-С:Н<Sn>
Author(s) -
А.П. Рягузов,
Р.Р. Немкаева,
Nazim Guseinov
Publication year - 2018
Publication title -
fizika i tehnika poluprovodnikov
Language(s) - English
Resource type - Journals
eISSN - 1726-7315
pISSN - 0015-3222
DOI - 10.21883/ftp.2018.10.46463.8785
Subject(s) - raman spectroscopy , photoluminescence , tin , materials science , amorphous solid , nanoparticle , composite number , sputter deposition , sputtering , analytical chemistry (journal) , ion , amorphous carbon , chemical engineering , band gap , spectroscopy , nanotechnology , crystallography , thin film , chemistry , metallurgy , composite material , optoelectronics , optics , organic chemistry , physics , engineering , quantum mechanics
The results of studies of the structure and properties of composite materials based on amorphous carbon ( a -C:H) films and tin nanoparticles are reported. The composite films are synthesized by the magnetron-assisted ion-plasma sputtering of a combined target in a 92%Ar : 4%CH_4 : 4%H_2 gas mixture. The dependence of the local structure of the a -C:H〈Sn〉 films on the conditions of synthesis and the content of Sn nanoparticles is clarified by means of Raman spectroscopy. The dependence of the photoluminescence intensity and the optical band gap of a -C:H〈Sn〉 films on the Sn content is shown.