Оптические свойства и механизм образования вакансионно-кислородных комплексов V-=SUB=-2-=/SUB=-O-=SUB=-2-=/SUB=- и V-=SUB=-3-=/SUB=-O-=SUB=-2-=/SUB=- в облученных кристаллах кремния | Zendy

Е. А. Толкачева | Zendy; В. П. Маркевич | Zendy; Л.И. Мурин | Zendy

Open Access

Оптические свойства и механизм образования вакансионно-кислородных комплексов V-=SUB=-2-=/SUB=-O-=SUB=-2-=/SUB=- и V-=SUB=-3-=/SUB=-O-=SUB=-2-=/SUB=- в облученных кристаллах кремния

Author(s) -

Е. А. Толкачева,

В. П. Маркевич,

Л.И. Мурин

Publication year - 2018

Publication title -

физика и техника полупроводников

Language(s) - English

Resource type - Journals

eISSN - 1726-7315

pISSN - 0015-3222

DOI - 10.21883/ftp.2018.09.46141.8806

Subject(s) - infrared spectroscopy , annealing (glass) , silicon , vacancy defect , analytical chemistry (journal) , absorption spectroscopy , infrared , irradiation , neutron , absorption (acoustics) , spectroscopy , oxygen , fourier transform infrared spectroscopy , materials science , crystallography , atomic physics , chemistry , physics , nuclear physics , optics , optoelectronics , organic chemistry , chromatography , quantum mechanics , composite material

The processes of the formation and annealing of V_ n O_ m ( n , m ≥ 2) vacancy–oxygen complexes in Czochralski silicon crystals irradiated with fast electrons and reactor neutrons have been studied by infrared absorption Fourier spectroscopy. A number of arguments are presented in favor of identification of absorption bands at 829.3 and 844.2 cm^–1 as being related to local vibrational modes of V_2O_2 and V_3O_2 complexes, respectively.

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