Open AccessОптические свойства и механизм образования вакансионно-кислородных комплексов V-=SUB=-2-=/SUB=-O-=SUB=-2-=/SUB=- и V-=SUB=-3-=/SUB=-O-=SUB=-2-=/SUB=- в облученных кристаллах кремния
Author(s) -
Е. А. Толкачева,
В. П. Маркевич,
Л. И. Мурин
Publication year - 2018
Publication title -
fizika i tehnika poluprovodnikov
Language(s) - English
Resource type - Journals
eISSN - 1726-7315
pISSN - 0015-3222
DOI - 10.21883/ftp.2018.09.46141.8806
Subject(s) - infrared spectroscopy , annealing (glass) , silicon , vacancy defect , analytical chemistry (journal) , absorption spectroscopy , infrared , irradiation , neutron , absorption (acoustics) , spectroscopy , oxygen , fourier transform infrared spectroscopy , materials science , crystallography , atomic physics , chemistry , physics , nuclear physics , optics , optoelectronics , organic chemistry , chromatography , quantum mechanics , composite material
The processes of the formation and annealing of V_ n O_ m ( n , m ≥ 2) vacancy–oxygen complexes in Czochralski silicon crystals irradiated with fast electrons and reactor neutrons have been studied by infrared absorption Fourier spectroscopy. A number of arguments are presented in favor of identification of absorption bands at 829.3 and 844.2 cm^–1 as being related to local vibrational modes of V_2O_2 and V_3O_2 complexes, respectively.