Open AccessГетероструктуры одночастотных и двухчастотных квантово-каскадных лазеров
Author(s) -
А.В. Бабичев,
А.С. Курочкин,
Е.С. Колодезный,
А.В. Филимонов,
А.А. Усикова,
В.Н. Неведомский,
А.Г. Гладышев,
Л.Я. Карачинский,
И.И. Новиков,
А.Ю. Егоров,
Д.В. Денисов
Publication year - 2018
Publication title -
fizika i tehnika poluprovodnikov
Language(s) - English
Resource type - Journals
eISSN - 1726-7315
pISSN - 0015-3222
DOI - 10.21883/ftp.2018.06.45922.8751
Subject(s) - heterojunction , cascade , quantum cascade laser , laser , optoelectronics , materials science , epitaxy , wavelength , quantum , quantum well , diffraction , terahertz radiation , optics , nanotechnology , physics , chemistry , chromatography , layer (electronics) , quantum mechanics
The results of development of the basic structure and technological conditions of growing heterostructures for single- and dual-frequency quantum-cascade lasers are reported. The heterostructure for a dual-frequency quantum-cascade laser includes cascades emitting at wavelengths of 9.6 and 7.6 μm. On the basis of the suggested heterostructure, it is possible to develop a quantum-cascade laser operating at a difference frequency of 8 THz. The heterostructures for the quantum-cascade laser are grown using molecularbeam epitaxy. The methods of X-ray diffraction and emission electron microscopy are used to study the structural properties of the fabricated heterostructures. Good agreement between the specified and realized thicknesses of the epitaxial layers and a high uniformity of the chemical composition and thicknesses of the epitaxial layers over the area of the heterostructure is demonstrated. A stripe-structured quantum-cascade laser is fabricated; its generation at a wavelength of 9.6 μm is demonstrated.