Open AccessОбразование радиационных дефектов в слабо легированных слоях n- и p-SiC при торможении протонов
Author(s) -
Владимир Вячеславович Козловский,
А. Э. Васильев,
П.А. Карасев,
А.А. Лебедев
Publication year - 2018
Publication title -
fizika i tehnika poluprovodnikov
Language(s) - English
Resource type - Journals
eISSN - 1726-7315
pISSN - 0015-3222
DOI - 10.21883/ftp.2018.03.45616.8741
Subject(s) - recoil , recombination , range (aeronautics) , materials science , atomic physics , cascade , scattering , frenkel defect , irradiation , molecular physics , nuclear physics , physics , chemistry , optics , biochemistry , chromatography , composite material , gene
Mathematical simulation of the cascade of displacements in SiC is used to consider the specific features of Frenkel-pair generation upon the scattering of 8- and 15-MeV protons. The distribution histograms of energies acquired not only by primary knocked-out atoms, but also by recoil atoms generated in displacement cascades, are calculated. An analysis of the histograms considers two energy ranges. In the first range of “low” energies, the spontaneous recombination of genetically related Frenkel pairs is dominant. Recoil atoms in the second range have a higher energy, which enables these atoms to leave the spontaneousrecombination zone and dissociate into isolated components. The compensation of lightly doped n - and p -4 H -SiC samples grown by gas-phase epitaxy is experimentally studied under irradiation with 8- and 15-MeV protons. The carrier removal rates are measured. The calculated and experimental data are compared and estimates are obtained for the size of the spontaneous-recombination zone.