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Author(s) -
Toon Brouwers
Publication year - 2019
Publication title -
documenta
Language(s) - Uncategorized
Resource type - Journals
ISSN - 0771-8640
DOI - 10.21825/doc.v21i1.10252
Subject(s) - deep reactive ion etching , materials science , composite material , reactive ion etching , etching (microfabrication) , layer (electronics)

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