Open AccessELLIPSOMETRIC METHODS FOR CONTROL OF PARAMETERS OF MATERIALS AND RADIOELECTRONICS STRUCTURES
Author(s) -
С. Ю. Боголюбова,
Е. Г. Полякова,
Р. Р. Резвый
Publication year - 2016
Publication title -
radiopromyšlennostʹ
Language(s) - English
Resource type - Journals
eISSN - 2541-870X
pISSN - 2413-9599
DOI - 10.21778/2413-9599-2016-3-59-62
Subject(s) - materials science