Open AccessHighly Stripped Ion Sources for MeV Ion Implantation
Author(s) -
A. Hershcovitch,
Michael Furey
Publication year - 2009
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/990451
Subject(s) - ion implantation , ion , ion source , materials science , atomic physics , engineering physics , physics , electrical engineering , optoelectronics , engineering , quantum mechanics