Open AccessNanomechanical properties of SiC films grown from C{sub 60} precursors using atomic force microscopy
Author(s) -
K. Morse,
M. Balooch,
A. V. Hamza,
J. Belak
Publication year - 1994
Language(s) - English
Resource type - Reports
DOI - 10.2172/96642
Subject(s) - nanoindentation , materials science , diamond , silicon nitride , substrate (aquarium) , elastic modulus , silicon , atomic force microscopy , composite material , conductive atomic force microscopy , nitride , nanotechnology , optoelectronics , layer (electronics) , oceanography , geology