Open AccessScience & Technology Review September/October 2008
Author(s) -
Jane P. Bearinger
Publication year - 2008
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/945510
Subject(s) - extreme ultraviolet lithography , supernova , lithography , operability , smoothing , computer science , nanotechnology , extreme ultraviolet , data science , physics , astrophysics , materials science , optics , laser , computer vision , software engineering