Open AccessControlling Contamination in No/Si Multilayer Mirrors by Si Surface-capping Modifications
Author(s) -
Michael E. Malinowski
Publication year - 2002
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/791298
Subject(s) - photoelectric effect , yield (engineering) , materials science , photon energy , photon , carbon fibers , angle of incidence (optics) , absorption (acoustics) , stack (abstract data type) , electron , silicon , standing wave , vacuum ultraviolet , atomic physics , extreme ultraviolet lithography , analytical chemistry (journal) , optoelectronics , optics , chemistry , physics , quantum mechanics , chromatography , composite number , computer science , composite material , programming language , metallurgy
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