Open AccessProton sputtering. Final report. [500 eV to 8 keV]
Author(s) -
C. R. Finfgeld
Publication year - 1975
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/7312829
Subject(s) - sputtering , proton , atomic physics , metal , materials science , nuclear physics , analytical chemistry (journal) , physics , chemistry , nanotechnology , metallurgy , thin film , chromatography
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