Open AccessSynthesis of silane and silicon in a nonequilibrium plasma jet. Third quarterly report, December 21, 1976--March 20, 1977. (AeroChem(TN)--17)
Author(s) -
H. F. Calcote,
W. Felder
Publication year - 1977
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/7310841
Subject(s) - silane , silicon , hydrogen , polycrystalline silicon , plasma , atom (system on chip) , crystallite , chemistry , hydrogen atom , analytical chemistry (journal) , nozzle , glow discharge , amorphous silicon , materials science , metallurgy , crystalline silicon , thermodynamics , crystallography , organic chemistry , physics , alkyl , electrode , quantum mechanics , computer science , embedded system , thin film transistor
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