Open AccessSynthesis of silane and silicon in a non-equilibrium plasma jet. Second quarterly report, September 21--December 20, 1976
Author(s) -
H. F. Calcote,
W. Felder
Publication year - 1976
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/7294659
Subject(s) - silane , hydrogen , silicon , chemistry , jet (fluid) , analytical chemistry (journal) , torr , plasma , atom (system on chip) , glow discharge , hydrogen atom , organic chemistry , thermodynamics , nuclear physics , physics , alkyl , computer science , embedded system
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