Open AccessSynthesis of silane and silicon in a non-equilibrium plasma jet. First quarterly report
Author(s) -
H. F. Calcote,
W. Felder
Publication year - 1976
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/7241276
Subject(s) - silicon , silane , hydrogen , dissociation (chemistry) , nozzle , plasma , chemistry , silicon tetrachloride , halide , trichlorosilane , hydrogen atom , atomic physics , materials science , analytical chemistry (journal) , thermodynamics , inorganic chemistry , organic chemistry , physics , alkyl , quantum mechanics
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